VTC-300USS Ultrasonic Spin-Spray Coater (500-3000 Rpm, 12" Wafer Max)

Brief introduction

VTC-300USS is a cost effective ultrasonic Spin-Spray Coater for liquid-phase, ultra-uniform coating process on a large substrate up to 12". The system consists of (1) a 12" spin coater with the vacuum chuck, (2) compressed air assisted ultrasonic spray nozzle mounted on a swing arm, (3) a heatable syringe pump, and (4) a heat lamp for substrate heating (optional). 

Features

Combine the benefits of both spin and spray, enabling dense and uniform liquid-phase coating onto a large substrate

Applications include low-temperature precipitation (e.g., for RF/microwave ferrites deposition), polymer coating, powder and composite material coating, and coating on a patterned / uneven substrate

The system also works on spin alone and spray alone modes. Multilayer process of different deposition methods is possible with the system 

Technical parameter

Vacuum chunk with adjustable substrate holders for holding flat substrate up to 12" diameter or 8" square

One oil-less pump for the vacuum chunk is included and controlled by the spin coater

Spin speed: 500 - 6000 rpm adjustable (3000 rpm max for 12" and 5000 rpm max for 8" wafer)

Digital control panel with two programmable segments of different spin times and speeds

One ultrasonic generator with two ultrasonic sprays nozzles with compressed air shaper is included

Two spray nozzles with the KF-25 adapter are included. (Click first picture from right to see details)

One cylindrical type -- narrower spray ~20 mm diameter

One cone type -- wider spray ~40 mm diameter

Recommended compressed air pressure for aqueous solution: ~2 psi

One swing arm for mounting ultrasonic spray head is built-in with adjustable speed and movement range

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